III-V Lab facilities

The III-V Lab facilities include:

• 1200 m² of clean rooms (class 10 000 or better) equipped with modern tools for opto- and micro-electronic device processing,
• several MBE, GS-MBE and MO-VPE reactors for epitaxial growth,
• numerous laboratories with the most sophisticated equipments for the characterization of ultra-fast opto-electronic devices and digital circuits, low noise and high power microwave circuits characterizations,
• a design centre for digital and microwave circuits,
• a workshop for the assembly of complex opto-electronic and microwave modules and demonstrators.

Room for coating and layer deposit	Reliability Room
	Control with SEM
	Photo-litho-development
Tests and Measurements	Design and Modelling Room

Visit the next page:

• Contact & Location